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Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films

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http://hal.in2p3.fr/in2p3-00003198
Contributor : Jocelyne Lorgeril <>
Submitted on : Tuesday, November 23, 1999 - 3:44:46 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:32 PM

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  • HAL Id : in2p3-00003198, version 1

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T. Heitz, C. Godet, J.E. Bouree, B. Drevillon, V. Chu, et al.. Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films. Flat-Panel Display Materials - 1998 Symposium of the Materials Research Society, Apr 1998, San Francisco, United States. pp.203-208. ⟨in2p3-00003198⟩

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