Skip to Main content Skip to Navigation
Journal articles

A high current ion implanter with hybrid scanning

Complete list of metadata

http://hal.in2p3.fr/in2p3-00003832
Contributor : Jocelyne Lorgeril <>
Submitted on : Thursday, January 13, 2000 - 4:00:23 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:33 PM

Identifiers

  • HAL Id : in2p3-00003832, version 1

Collections

Citation

J. Camplan, J. Chaumont, R. Meunier, R. Graber, J.C. Rouge, et al.. A high current ion implanter with hybrid scanning. Nuclear Instruments and Methods in Physics Research, Elsevier, 1980, 171, pp.245-250. ⟨in2p3-00003832⟩

Share

Metrics

Record views

116