Skip to Main content Skip to Navigation
Journal articles

Rapid thermal annealing and titanium silicide formation

Document type :
Journal articles
Complete list of metadata

http://hal.in2p3.fr/in2p3-00006489
Contributor : Yvette Heyd <>
Submitted on : Tuesday, October 10, 2000 - 4:24:42 PM
Last modification on : Thursday, April 23, 2020 - 2:26:15 PM

Identifiers

  • HAL Id : in2p3-00006489, version 1

Collections

Citation

D. Levy, J.P. Ponpon, A. Grob, J.J. Grob, R. Stuck. Rapid thermal annealing and titanium silicide formation. Applied physics. A, Materials science & processing, Springer Verlag, 1985, 38, pp.23. ⟨in2p3-00006489⟩

Share

Metrics

Record views

224