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Conference papers

Recoil implantation of antimony into silicon

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Conference papers
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http://hal.in2p3.fr/in2p3-00006698
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Monday, October 23, 2000 - 7:38:30 AM
Last modification on : Thursday, April 23, 2020 - 2:26:15 PM

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  • HAL Id : in2p3-00006698, version 1

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A. Grob, J.J. Grob, N. Mesli, D. Salles, P. Siffert. Recoil implantation of antimony into silicon. International Conference on Ion Beam Modification of Materials 2, Jul 1980, Albany, United States. pp.85-92. ⟨in2p3-00006698⟩

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