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Analysis of vibrational properties of thin films using in-situ infrared ellipsometry: applications to polymer-like amorphous carbon films

T. Heitz B. Drevillon C. Godet J.E. Bouree C. Clerc 1
1 CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse
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http://hal.in2p3.fr/in2p3-00007066
Contributor : Jocelyne Lorgeril <>
Submitted on : Tuesday, November 28, 2000 - 4:12:41 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:33 PM

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  • HAL Id : in2p3-00007066, version 1

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T. Heitz, B. Drevillon, C. Godet, J.E. Bouree, C. Clerc. Analysis of vibrational properties of thin films using in-situ infrared ellipsometry: applications to polymer-like amorphous carbon films. Plasma Deposition and Treatment of Polymers. Symposium, Nov 1998, Boston, United States. pp.71-76. ⟨in2p3-00007066⟩

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