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Amorphous hydrogenated carbon films elaborated by plasma-assisted chemical vapour deposition : characterization of composition by nuclear methods

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http://hal.in2p3.fr/in2p3-00007551
Contributor : Sylvie Flores <>
Submitted on : Thursday, February 18, 1999 - 8:46:41 AM
Last modification on : Tuesday, November 19, 2019 - 2:37:02 AM

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  • HAL Id : in2p3-00007551, version 1

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L. Deshayes, M. Charbonnier, M. Romand, Thomas Petit, N. Chevarier, et al.. Amorphous hydrogenated carbon films elaborated by plasma-assisted chemical vapour deposition : characterization of composition by nuclear methods. European Materials Research Society Conference, May 1993, Strasbourg, France. pp.264-268. ⟨in2p3-00007551⟩

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