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Energetic ion scattering and flow discharge optical spectrometry characterization of amorphous hydrogenated carbon films elaborated by PACVD

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http://hal.in2p3.fr/in2p3-00009852
Contributor : Sylvie Flores <>
Submitted on : Monday, February 12, 2001 - 1:56:13 PM
Last modification on : Tuesday, November 19, 2019 - 2:44:20 AM

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  • HAL Id : in2p3-00009852, version 1

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Thomas Petit, A. Chevarier, N. Chevarier. Energetic ion scattering and flow discharge optical spectrometry characterization of amorphous hydrogenated carbon films elaborated by PACVD. International Ion Beam Surface Specific Analysis 3, Apr 1993, Namur, Belgium. ⟨in2p3-00009852⟩

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