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Integration of CMOS-electronics and particle detector diodes in high-resistivity silicon-on-insulator wafers

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http://hal.in2p3.fr/in2p3-00010039
Contributor : Magali Damoiseaux <>
Submitted on : Tuesday, July 10, 2001 - 3:44:25 PM
Last modification on : Tuesday, March 30, 2021 - 3:18:55 AM

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  • HAL Id : in2p3-00010039, version 1

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B. Dierickx, D. Wouters, G. Willems, A. Alaerts, I. Debusschere, et al.. Integration of CMOS-electronics and particle detector diodes in high-resistivity silicon-on-insulator wafers. IEEE Transactions on Nuclear Science, Institute of Electrical and Electronics Engineers, 1993, 40, pp.753-758. ⟨in2p3-00010039⟩

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