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The role of nitrogen in the formation of luminescent silicon nanoprecipitates during heat treatment of SiO$_2$ layers implanted with Si$^+$

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http://hal.in2p3.fr/in2p3-00010708
Contributor : Jocelyne Lorgeril Connect in order to contact the contributor
Submitted on : Wednesday, December 19, 2001 - 10:20:37 AM
Last modification on : Wednesday, September 16, 2020 - 4:06:34 PM

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  • HAL Id : in2p3-00010708, version 1

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G.A. Kachurin, S.G. Yanovskaya, K.S. Zhuravlev, M.O. Ruault. The role of nitrogen in the formation of luminescent silicon nanoprecipitates during heat treatment of SiO$_2$ layers implanted with Si$^+$. Semiconductors, 2001, 35, pp.1182-1186. ⟨in2p3-00010708⟩

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