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How nanocavities in amorphous Si shrink under ion beam irradiation: An in situ study

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http://hal.in2p3.fr/in2p3-00011971
Contributor : Jocelyne Lorgeril <>
Submitted on : Wednesday, October 16, 2002 - 4:13:17 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:35 PM

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  • HAL Id : in2p3-00011971, version 1

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M.O. Ruault, F. Fortuna, H. Bernas, M.C. Ridgway, J.S. Williams. How nanocavities in amorphous Si shrink under ion beam irradiation: An in situ study. Applied Physics Letters, American Institute of Physics, 2002, 81, pp.2617-2619. ⟨in2p3-00011971⟩

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