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Process control srategy of the silicon sensors production for the CMS tracker

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http://hal.in2p3.fr/in2p3-00012400
Contributor : Yvette Heyd <>
Submitted on : Monday, January 13, 2003 - 10:40:21 AM
Last modification on : Thursday, April 23, 2020 - 2:26:17 PM

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  • HAL Id : in2p3-00012400, version 1

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T. Bergauer, J.C. Fontaine, J.M. Helleboid, M. Krammer, A. Macchiolo. Process control srategy of the silicon sensors production for the CMS tracker. 8th International Conference on Instrumentation for Colliding Beam Physics, Feb 2002, Novosibirsl, Russia. pp.218-222. ⟨in2p3-00012400⟩

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