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Composition, structure and annealing-induced phase separation in SiO$_x$ films produced by thermal evaporation of SiO$_x$ in vacuum

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http://hal.in2p3.fr/in2p3-00012611
Contributor : Jocelyne Lorgeril <>
Submitted on : Monday, March 3, 2003 - 4:34:55 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:35 PM

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  • HAL Id : in2p3-00012611, version 1

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D. Nesheva, I. Bineva, Z. Levi, Z. Aneva, T. Merdzhanova, et al.. Composition, structure and annealing-induced phase separation in SiO$_x$ films produced by thermal evaporation of SiO$_x$ in vacuum. Vacuum, Elsevier, 2002, 68, pp.1-9. ⟨in2p3-00012611⟩

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