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Gas-phase mechanism in the growth of ZrC$_y$N$_{1-y}$ thin films by pulsed reactive crossed-beam laser ablation

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http://hal.in2p3.fr/in2p3-00012840
Contributor : Jocelyne Lorgeril <>
Submitted on : Thursday, June 5, 2003 - 3:39:00 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:35 PM

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  • HAL Id : in2p3-00012840, version 1

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H. Spillmann, C. Clerc, M. Dobeli, P.R. Willmott. Gas-phase mechanism in the growth of ZrC$_y$N$_{1-y}$ thin films by pulsed reactive crossed-beam laser ablation. Applied Surface Science, Elsevier, 2002, 197-198, pp.304-311. ⟨in2p3-00012840⟩

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