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Sio$_2$-ta$_2o_5$ sputtering yields : simulated and experimental results

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http://hal.in2p3.fr/in2p3-00012956
Contributor : Sylvie Flores Connect in order to contact the contributor
Submitted on : Tuesday, February 9, 1999 - 10:13:35 AM
Last modification on : Friday, September 10, 2021 - 1:50:05 PM

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  • HAL Id : in2p3-00012956, version 1

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E. Vireton, P. Ganau, J.-M. Mackowski, Christine Michel, L. Pinard, et al.. Sio$_2$-ta$_2o_5$ sputtering yields : simulated and experimental results. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 1995, 95, pp.34-40. ⟨in2p3-00012956⟩

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