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Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering

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http://hal.in2p3.fr/in2p3-00013246
Contributor : Sylvie Flores <>
Submitted on : Monday, May 31, 1999 - 3:50:44 PM
Last modification on : Tuesday, November 19, 2019 - 2:38:56 AM

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  • HAL Id : in2p3-00013246, version 1

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A. Chevarier, N. Chevarier, M. El Bouanani, E. Gerlic, M. Stern, et al.. Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering. International Conference On Solid Films And Surfaces 5, Aug 1990, Providence, United States. pp.215-221. ⟨in2p3-00013246⟩

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