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Crystalline effect on the lateral spread of implanted ions

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http://hal.in2p3.fr/in2p3-00013379
Contributor : Jocelyne Lorgeril <>
Submitted on : Wednesday, March 29, 2000 - 4:59:56 PM
Last modification on : Wednesday, September 16, 2020 - 4:06:41 PM

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  • HAL Id : in2p3-00013379, version 1

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S.T. Nakagawa, Y. Hada, L. Thome. Crystalline effect on the lateral spread of implanted ions. 1998 International Conference on Ion Implantation Technology, Jun 1998, Kyoto, Japan. pp.767-770. ⟨in2p3-00013379⟩

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