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Vacancy related defect profiles in MeV cluster-ion irradiated silicon

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http://hal.in2p3.fr/in2p3-00014513
Contributor : Suzanne Robert <>
Submitted on : Tuesday, April 13, 1999 - 11:19:33 AM
Last modification on : Thursday, November 19, 2020 - 2:20:21 PM

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A. Hallen, P. Haakansson, J. Olsson, A. Brunelle, S. Della-Negra, et al.. Vacancy related defect profiles in MeV cluster-ion irradiated silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 1995, 106, pp.233-236. ⟨in2p3-00014513⟩

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