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Composition and structure of titanium carbonitride thin film synthesized by ion implantation

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http://hal.in2p3.fr/in2p3-00015151
Contributor : Yvette Heyd <>
Submitted on : Friday, March 24, 2000 - 4:43:29 PM
Last modification on : Thursday, April 23, 2020 - 2:26:18 PM

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  • HAL Id : in2p3-00015151, version 1

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M. Guemmaz, A. Mosser, J.J. Grob, J.C. Sens, R. Stuck. Composition and structure of titanium carbonitride thin film synthesized by ion implantation. Surface and Coatings Technology, Elsevier, 1996, 80, pp.53-56. ⟨in2p3-00015151⟩

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