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A dechanneling investigation of mev oxygen implanted silicon

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http://hal.in2p3.fr/in2p3-00015427
Contributor : Yvette Heyd <>
Submitted on : Wednesday, May 3, 2000 - 2:20:21 PM
Last modification on : Thursday, April 23, 2020 - 2:26:18 PM

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A. Grob, J.J. Grob, P. Thevenin, P. Siffert. A dechanneling investigation of mev oxygen implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 1991, 58, pp.236-241. ⟨in2p3-00015427⟩

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