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Characterization of silicon during the fabrication of nuclear detectors by the planar process

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http://hal.in2p3.fr/in2p3-00015759
Contributor : Yvette Heyd <>
Submitted on : Thursday, May 25, 2000 - 1:32:49 PM
Last modification on : Thursday, April 23, 2020 - 2:26:18 PM

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  • HAL Id : in2p3-00015759, version 1

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J.C. Fontaine, S. Barthe, J.P. Ponpon, J.P. Schunck, P. Siffert. Characterization of silicon during the fabrication of nuclear detectors by the planar process. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Elsevier, 1993, 326, pp.10-15. ⟨in2p3-00015759⟩

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