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Large diffusion length enhancement in silicon by rapid thermal codiffusion of phosphorous and aluminium

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http://hal.in2p3.fr/in2p3-00015779
Contributor : Yvette Heyd <>
Submitted on : Thursday, May 25, 2000 - 4:36:17 PM
Last modification on : Thursday, April 23, 2020 - 2:26:18 PM

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  • HAL Id : in2p3-00015779, version 1

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B. Hartiti, A. Slaoui, J.C. Muller, P. Siffert. Large diffusion length enhancement in silicon by rapid thermal codiffusion of phosphorous and aluminium. Applied Physics Letters, American Institute of Physics, 1993, 63, pp.1249-1251. ⟨in2p3-00015779⟩

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