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Damage created in silicon by 1 MeV O$^+$ ions as a function of beam power

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http://hal.in2p3.fr/in2p3-00015889
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Tuesday, May 30, 2000 - 3:12:51 PM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00015889, version 1

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A. Grob, J.J. Grob, P. Siffert. Damage created in silicon by 1 MeV O$^+$ ions as a function of beam power. Spring Meeting of the European Materials Research Society (E-Mrs) Symposium C on High Energy Ion Implantation, May 1991, Strasbourg, France. pp.309-313. ⟨in2p3-00015889⟩

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