Phosphorous Diffusion into Silicon from a Spin-on source using rapid Thermal processing

B. Hartiti; A. Slaoui; J.C. Muller; R. Stuck; P. Siffert

Journal articles

Phosphorous Diffusion into Silicon from a Spin-on source using rapid Thermal processing

B. Hartiti ¹ A. Slaoui ¹ J.C. Muller ¹ R. Stuck ¹ P. Siffert ¹

1 IReS - Institut de Recherches Subatomiques

Document type :

Journal articles

Domain :

Physics [physics] / Nuclear Experiment [nucl-ex]

Complete list of metadata

http://hal.in2p3.fr/in2p3-00015971
Contributor : Yvette Heyd <>
Submitted on : Monday, June 5, 2000 - 10:07:21 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

Phosphorous Diffusion into Silicon from a Spin-on source using rapid Thermal processing

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Phosphorous Diffusion into Silicon from a Spin-on source using rapid Thermal processing

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