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Phosphorous Diffusion into Silicon from a Spin-on source using rapid Thermal processing

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http://hal.in2p3.fr/in2p3-00015971
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Monday, June 5, 2000 - 10:07:21 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00015971, version 1

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B. Hartiti, A. Slaoui, J.C. Muller, R. Stuck, P. Siffert. Phosphorous Diffusion into Silicon from a Spin-on source using rapid Thermal processing. Journal of Applied Physics, American Institute of Physics, 1992, 71, pp.5474-5478. ⟨in2p3-00015971⟩

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