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Defect generation and gettering during rapid thermal processing

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http://hal.in2p3.fr/in2p3-00016007
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Tuesday, June 6, 2000 - 1:59:58 PM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00016007, version 1

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B. Hartiti, J.C. Muller, P. Siffert. Defect generation and gettering during rapid thermal processing. IEEE Transactions on Electron Devices, Institute of Electrical and Electronics Engineers, 1992, 39, pp.96-104. ⟨in2p3-00016007⟩

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