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Synthesis of SiO$_2$ thin films by reactive excimer laser ablation

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http://hal.in2p3.fr/in2p3-00016023
Contributor : Yvette Heyd <>
Submitted on : Tuesday, June 6, 2000 - 3:40:29 PM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00016023, version 1

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E. Fogarassy, A. Slaoui, C. Fuchs, J.P. Stoquert. Synthesis of SiO$_2$ thin films by reactive excimer laser ablation. Applied Surface Science, Elsevier, 1992, 54, pp.180-186. ⟨in2p3-00016023⟩

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