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Uv photo-assisted formation of silicon dioxide

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http://hal.in2p3.fr/in2p3-00016037
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Tuesday, June 6, 2000 - 4:47:37 PM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00016037, version 1

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E. Fogarassy. Uv photo-assisted formation of silicon dioxide. Photochemical processing formation of electronic materials, Academic Press, pp.233-255, 1992. ⟨in2p3-00016037⟩

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