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Pulsed excimer and Nd: YAG laser crystallization of a-Si: H

M. Elliq 1 E. Fogarassy 1 J.P. Stoquert 1 C. Fuchs 1 S. de Unamuno 1
1 IReS - Institut de Recherches Subatomiques
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http://hal.in2p3.fr/in2p3-00016044
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Wednesday, June 7, 2000 - 8:38:56 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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M. Elliq, E. Fogarassy, J.P. Stoquert, C. Fuchs, S. de Unamuno. Pulsed excimer and Nd: YAG laser crystallization of a-Si: H. Applied Surface Science, Elsevier, 1990, 46, pp.378. ⟨in2p3-00016044⟩

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