http://hal.in2p3.fr/in2p3-00016161 Contributor : Yvette HeydConnect in order to contact the contributor Submitted on : Thursday, June 29, 2000 - 8:24:18 AM Last modification on : Thursday, April 23, 2020 - 2:26:19 PM
A. Slaoui, F. Foulon, P. Siffert. Excimer laser induced doping of phosphorus into silicon. Journal of Applied Physics, American Institute of Physics, 1990, 67, pp.6197. ⟨in2p3-00016161⟩