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Infrared characterization of UV laser-induced silicon oxide films

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http://hal.in2p3.fr/in2p3-00017504
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Wednesday, September 27, 2000 - 9:43:15 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00017504, version 1

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A. Slaoui, E. Fogarassy, C.W. White, P. Siffert. Infrared characterization of UV laser-induced silicon oxide films. Applied Physics Letters, American Institute of Physics, 1988, 53, pp.1832. ⟨in2p3-00017504⟩

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