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Rapid thermal oxidation of silicon monoxide

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http://hal.in2p3.fr/in2p3-00017596
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Thursday, September 28, 2000 - 9:41:24 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00017596, version 1

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E. Fogarassy, A. Slaoui, C. Fuchs, J.L. Regolini. Rapid thermal oxidation of silicon monoxide. Applied Physics Letters, American Institute of Physics, 1987, 51, pp.337. ⟨in2p3-00017596⟩

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