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Plasma transformation of SiO films in SiO$_2$ at room temperature

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http://hal.in2p3.fr/in2p3-00017602
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Thursday, September 28, 2000 - 10:18:58 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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J. Perriere, B. Pelloie, E. Fogarassy, A. Slaoui. Plasma transformation of SiO films in SiO$_2$ at room temperature. Applied Surface Science, Elsevier, 1987, 29, pp.433. ⟨in2p3-00017602⟩

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