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Determination of the conversion factor for infrared measurements of carbon in silicon

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http://hal.in2p3.fr/in2p3-00017731
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Tuesday, October 3, 2000 - 9:10:12 AM
Last modification on : Friday, April 2, 2021 - 4:46:04 PM

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  • HAL Id : in2p3-00017731, version 1

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J.L. Regolini, J.P. Stoquert, C. Ganter, P. Siffert. Determination of the conversion factor for infrared measurements of carbon in silicon. Journal of The Electrochemical Society, Electrochemical Society, 1986, 133, pp.2165-2167. ⟨in2p3-00017731⟩

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