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Laser-beam annealing of heavily damaged implanted layers on silicon

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http://hal.in2p3.fr/in2p3-00018025
Contributor : Yvette Heyd <>
Submitted on : Wednesday, November 8, 2000 - 8:56:33 AM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00018025, version 1

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J.C. Muller, A. Grob, J.J. Grob, R. Stuck, P. Siffert. Laser-beam annealing of heavily damaged implanted layers on silicon. Applied Physics Letters, American Institute of Physics, 1978, 33, pp.287-289. ⟨in2p3-00018025⟩

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