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Study by gamma-ray spectroscopy of the optimal conditions to produce thin films of TiO$_2$ by refractive cathode sputtering

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http://hal.in2p3.fr/in2p3-00018735
Contributor : Yvette Heyd <>
Submitted on : Tuesday, January 16, 2001 - 1:08:40 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

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  • HAL Id : in2p3-00018735, version 1

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B. Laville-Saint-Martin, J.C. Sens. Study by gamma-ray spectroscopy of the optimal conditions to produce thin films of TiO$_2$ by refractive cathode sputtering. Nouvelle Revue d'Optique Appliquée, 1971, 2, pp.63-37. ⟨in2p3-00018735⟩

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