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Journal articles

Analysis of the thermal contribution to UV laser-induced oxidation of silicon and silicon monoxide

E. Fogarassy 1 S. de Unamuno 1 J.L. Regolini C. Fuchs 1
1 IReS - Institut de Recherches Subatomiques
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http://hal.in2p3.fr/in2p3-00018826
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Tuesday, January 23, 2001 - 8:04:57 AM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

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E. Fogarassy, S. de Unamuno, J.L. Regolini, C. Fuchs. Analysis of the thermal contribution to UV laser-induced oxidation of silicon and silicon monoxide. Philosophical Magazine B, Informa UK (Taylor & Francis), 1987, 55, pp.253-260. ⟨in2p3-00018826⟩

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