Skip to Main content Skip to Navigation
Theses

Photodecomposition de monosilane sensibilisee au mercure (Hg-Photo-CVD): Application au depot en couches minces du silicium amorphe hydrogene (a-Si/H)

Document type :
Theses
Complete list of metadata

http://hal.in2p3.fr/in2p3-00019116
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Friday, February 23, 2001 - 2:29:27 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

Identifiers

  • HAL Id : in2p3-00019116, version 1

Collections

Citation

B. Aka. Photodecomposition de monosilane sensibilisee au mercure (Hg-Photo-CVD): Application au depot en couches minces du silicium amorphe hydrogene (a-Si/H). Université Louis Pasteur - Strasbourg I, 1989. English. ⟨in2p3-00019116⟩

Share

Metrics

Record views

31