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Theses

Dopage photoassiste par laser excimere du silicium place sous atmosphere de gaz dopant

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http://hal.in2p3.fr/in2p3-00019124
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Friday, February 23, 2001 - 2:45:54 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

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  • HAL Id : in2p3-00019124, version 1

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F. Foulon. Dopage photoassiste par laser excimere du silicium place sous atmosphere de gaz dopant. Université Paris-Diderot - Paris VII, 1989. English. ⟨in2p3-00019124⟩

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