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Low cost molecular ion implantation equipment

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http://hal.in2p3.fr/in2p3-00019428
Contributor : Yvette Heyd <>
Submitted on : Tuesday, May 29, 2001 - 4:13:16 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

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  • HAL Id : in2p3-00019428, version 1

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J.C. Muller, P. Siffert. Low cost molecular ion implantation equipment. International Conference On Ion Implantation Equipment And Techniques 3, Jul 1980, Kingston, Canada. pp.205-210. ⟨in2p3-00019428⟩

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