Skip to Main content Skip to Navigation
Conference papers

Some problems arising in hydrogen passivation of silicon by ion bombardment techniques

Complete list of metadata

http://hal.in2p3.fr/in2p3-00019431
Contributor : Yvette Heyd <>
Submitted on : Tuesday, May 29, 2001 - 4:45:42 PM
Last modification on : Wednesday, February 17, 2021 - 11:50:24 AM

Identifiers

  • HAL Id : in2p3-00019431, version 1

Citation

J.C. Muller, Y. Ababou, A. Barhdadi, A. Mesli, M. Toulemonde, et al.. Some problems arising in hydrogen passivation of silicon by ion bombardment techniques. Ion Beam Modification Of Materials Conference,Ibmm '84, Jul 1984, Ithaca, United States. pp.304-309. ⟨in2p3-00019431⟩

Share

Metrics

Record views

436