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Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures

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http://hal.in2p3.fr/in2p3-00019443
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Wednesday, May 30, 2001 - 10:07:47 AM
Last modification on : Wednesday, February 17, 2021 - 11:50:25 AM

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  • HAL Id : in2p3-00019443, version 1

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M.C. Busch, A. Slaoui, P. Siffert, E. Dooryhee, M. Toulemonde. Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures. Journal of Applied Physics, American Institute of Physics, 1992, 71, pp.2596-2601. ⟨in2p3-00019443⟩

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