Skip to Main content Skip to Navigation
Journal articles

A study of 2 MeV oxygen implantation to form deeply buried SiO$_2$ layers

Document type :
Journal articles
Complete list of metadata

http://hal.in2p3.fr/in2p3-00019452
Contributor : Yvette Heyd <>
Submitted on : Wednesday, May 30, 2001 - 1:42:13 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

Identifiers

  • HAL Id : in2p3-00019452, version 1

Collections

Citation

J.J. Grob, A. Grob, P. Thevenin, P. Siffert, C. d'Anterroches, et al.. A study of 2 MeV oxygen implantation to form deeply buried SiO$_2$ layers. Journal of Materials Research, Cambridge University Press (CUP), 1989, 4, pp.1227-1232. ⟨in2p3-00019452⟩

Share

Metrics

Record views

243