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Journal articles

Thermal annealing of excimer-laser-induced defects in virgin silicon

B. Hartiti 1 A. Slaoui 1 J.C. Muller 1 P. Siffert 1
1 IReS - Institut de Recherches Subatomiques
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Journal articles
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http://hal.in2p3.fr/in2p3-00019453
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Wednesday, May 30, 2001 - 1:47:32 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

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B. Hartiti, A. Slaoui, J.C. Muller, P. Siffert. Thermal annealing of excimer-laser-induced defects in virgin silicon. Materials Science and Engineering, Elsevier, 1989, B4, pp.257-260. ⟨in2p3-00019453⟩

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