Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

W.-O. Adekoya; J.C. Muller; P. Siffert

Journal articles

Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

W.-O. Adekoya J.C. Muller ¹ P. Siffert ¹

1 IReS - Institut de Recherches Subatomiques

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Journal articles

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http://hal.in2p3.fr/in2p3-00019460
Contributor : Yvette Heyd <>
Submitted on : Thursday, May 31, 2001 - 8:00:43 AM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

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Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

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