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Conference papers

Damage profiles and annealing of Si(B) implants

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Conference papers
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http://hal.in2p3.fr/in2p3-00019492
Contributor : Yvette Heyd <>
Submitted on : Thursday, May 31, 2001 - 2:57:12 PM
Last modification on : Thursday, April 23, 2020 - 2:26:20 PM

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  • HAL Id : in2p3-00019492, version 1

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J.J. Grob, P. Siffert, R. Prisslinger, S. Kalbitzer. Damage profiles and annealing of Si(B) implants. International Conference On Applications Of Ion Beams To Materials, Sep 1975, Warwick, United Kingdom. pp.24-30. ⟨in2p3-00019492⟩

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