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Trends to a semi-empirical model for cluster induced metal sputtering

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http://hal.in2p3.fr/in2p3-00021962
Contributor : Suzanne Robert Connect in order to contact the contributor
Submitted on : Monday, June 21, 2004 - 2:48:53 PM
Last modification on : Thursday, November 19, 2020 - 2:20:21 PM

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  • HAL Id : in2p3-00021962, version 1

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A. Brunelle, S. Della-Negra. Trends to a semi-empirical model for cluster induced metal sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2004, 222, pp.68-74. ⟨in2p3-00021962⟩

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