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Comparison of ion irradiation effects in silicon-based preceramic thin films

J.C. Pivin 1 P. Colombo
1 CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse
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http://hal.in2p3.fr/in2p3-00022641
Contributor : Jocelyne Lorgeril <>
Submitted on : Monday, May 22, 2000 - 5:15:21 PM
Last modification on : Wednesday, September 16, 2020 - 4:07:08 PM

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  • HAL Id : in2p3-00022641, version 1

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J.C. Pivin, P. Colombo. Comparison of ion irradiation effects in silicon-based preceramic thin films. Journal of the American Ceramic Society, Wiley, 2000, 83, pp.713-720. ⟨in2p3-00022641⟩

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