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Low temperature NbSi thin film thermometers on Silicon Nitride membranes for bolometer applications

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http://hal.in2p3.fr/in2p3-00022842
Contributor : Jocelyne Lorgeril Connect in order to contact the contributor
Submitted on : Tuesday, May 9, 2000 - 3:25:06 PM
Last modification on : Wednesday, September 16, 2020 - 4:07:23 PM

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  • HAL Id : in2p3-00022842, version 1

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P. Camus, L. Berge, L. Dumoulin, S. Marnieros, J.P. Torre. Low temperature NbSi thin film thermometers on Silicon Nitride membranes for bolometer applications. International workshop on low temperature detectors 8 LTD-8, Aug 1999, Dalfsen, Netherlands. pp.419-422. ⟨in2p3-00022842⟩

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