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Microscopic mechanisms of cobalt disilicide nucleation in silicon

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http://hal.in2p3.fr/in2p3-00025460
Contributor : Dominique Girod <>
Submitted on : Monday, January 23, 2006 - 3:39:29 PM
Last modification on : Wednesday, September 16, 2020 - 4:17:35 PM

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  • HAL Id : in2p3-00025460, version 1

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V.A. Borodin, M.-O. Ruault, M.G. Ganchenkova, F. Fortuna. Microscopic mechanisms of cobalt disilicide nucleation in silicon. Gettering and Defect Engineering in Semiconductor Technology XI, Sep 2005, Giens, France. pp.133-138. ⟨in2p3-00025460⟩

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