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Fabrication of large NbSi bolometer arrays for CMB applications

Abstract : Future cosmic microwave background experiments for high-resolution anisotropy mapping and polarisation detection require large arrays of bolometers at low temperature. We have developed a process to build arrays of antenna-coupled bolometers for that purpose. With adjustment of the NbxSi1-x alloy composition, the array can be made of high impedance or superconductive (TES) sensors.
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http://hal.in2p3.fr/in2p3-00068845
Contributor : Dominique Girod <>
Submitted on : Monday, May 15, 2006 - 11:15:07 AM
Last modification on : Wednesday, September 16, 2020 - 4:17:40 PM

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M. Ukibe, B. Belier, P. Camus, C. Dobrea, L. Dumoulin, et al.. Fabrication of large NbSi bolometer arrays for CMB applications. 11th International Workshop on Low Temperature Detectors - LTD-11, Jul 2005, Tokyo, Japan. pp.554-556, ⟨10.1016/j.nima.2005.12.069⟩. ⟨in2p3-00068845⟩

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