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Cooperation with Korea on distributed microwave plasma reactors for surface processing applications in industry

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http://hal.in2p3.fr/in2p3-00365328
Contributor : Emmanuelle Vernay <>
Submitted on : Tuesday, March 3, 2009 - 11:09:07 AM
Last modification on : Thursday, November 19, 2020 - 12:59:04 PM

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  • HAL Id : in2p3-00365328, version 1

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J. Pelletier. Cooperation with Korea on distributed microwave plasma reactors for surface processing applications in industry. FKPPL Workshop, Feb 2009, Villeurbanne, France. ⟨in2p3-00365328⟩

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